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1

SPIE Proceedings [SPIE SPIE Photomask Technology - Monterey, California (Monday 13 September 2010)] Photomask Technology 2010 - Substrate aware OPC rules for edge effect in block levels

Shao, Dongbing, Montgomery, M. Warren, Maurer, Wilhelm, Bailey, Todd C., Stobert, Ian, Popova, Irene, Chang, Chan Sam

Year:

2010

Language:

english

File:

PDF, 1.16 MB

english, 2010

2

[IEEE 2007 IEEE Symposium on VLSI Technology - Kyoto, Japan (2007.06.12-2007.06.14)] 2007 IEEE Symposium on VLSI Technology - Strained Si Channel MOSFETs with Embedded Silicon Carbon Formed by Solid Phase Epitaxy

Liu, Yaocheng, Gluschenkov, Oleg, Li, Jinghong, Madan, Anita, Ozcan, Ahmet, Kim, Byeong, Dyer, Tom, Chakravarti, Ashima, Chan, Kevin, Lavoie, Christian, Popova, Irene, Pinto, Teresa, Rovedo, Nivo, Luo

Year:

2007

Language:

english

File:

PDF, 453 KB

english, 2007

3

SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California, USA (Sunday 27 February 2011)] Advances in Resist Materials and Processing Technology XXVIII - Developable BARC (DBARC) technology as a solution to today's implant lithography challenges

Cameron, James, Allen, Robert D., Somervell, Mark H., Sung, Jin Wuk, Wong, Sabrina, Ware, Adam, Yamamoto, Yoshihiro, Kitaguchi, Hiroaki, Vyklicky, Libor, Holmes, Steve, Popova, Irene, Kwong, Ranee, Va

Year:

2011

Language:

english

File:

PDF, 1.04 MB

english, 2011

4

SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California, USA (Sunday 24 February 2008)] Advances in Resist Materials and Processing Technology XXV - A new class of low bake resists for 193-nm immersion lithography

Henderson, Clifford L., Sooriyakumaran, Ratnam, DiPietro, Richard, Truong, Hoa, Brock, Phillip, Allen, Robert, Bozano, Luisa, Popova, Irene, Huang, Wu-Song, Chen, Rex, Khojasteh, Mahmoud, Varanasi, Pu

Year:

2008

Language:

english

File:

PDF, 634 KB

english, 2008

5

Oxygen-Containing Functional Groups on Single-Wall Carbon Nanotubes: NEXAFS and Vibrational Spectroscopic Studies

Kuznetsova, Anya, Popova, Irene, Yates,, John T., Bronikowski, Michael J., Huffman, Chad B., Liu, Jie, Smalley, Richard E., Hwu, Henry H., Chen, Jingguang G.

Journal:

Journal of the American Chemical Society

Year:

2001

Language:

english

File:

PDF, 150 KB

english, 2001

6

Adsorption and Thermal Behavior of Benzotriazole Chemisorbed on γ-Al 2 O 3

Popova, Irene, Yates, John T.

Journal:

Year:

1997

Language:

english

File:

PDF, 460 KB

english, 1997

7

SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, CA (Sunday 22 February 2009)] Advances in Resist Materials and Processing Technology XXVI - Message to the undecided: using DUV dBARC for 32 nm node implants

Lee, Hyung-Rae, Popova, Irene Y., Rolick, JoAnn M., Gomez, Juan-Manuel, Bailey, Todd C., Henderson, Clifford L.

Year:

2009

Language:

english

File:

PDF, 1.04 MB

english, 2009

8

SPIE Proceedings [SPIE Advanced Lithography - San Jose, CA (Sunday 25 February 2007)] Advances in Resist Materials and Processing Technology XXIV - High-performance 193nm photoresists based on fluorosulfonamide

Li, Wenjie, Lin, Qinghuang, Chen, Kuang-Jung, Kwong, Ranee, Lawson, Margaret C., Khojasteh, Mahmoud, Popova, Irene, Varanasi, P. Rao, Shimokawa, Tsutomu, Yamaguchi, Yoshikazu, Kusumoto, Shiro, Sugiura

Year:

2007

Language:

english

File:

PDF, 554 KB

english, 2007

9

SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California (Sunday 21 February 2010)] Advances in Resist Materials and Processing Technology XXVII - Design and development of production-worthy developable BARCs(DBARCs) for implant lithography

Cameron, James, Allen, Robert D., Amara, John, Sung, Jin Wuk, Valeri, David, Ware, Adam, O'Shea, Kevin, Yamamoto, Yoshihiro, Kitaguchi, Hiroaki, Vyklicky, Libor, Popova, Irene, Varanasi, Pushkara R.

Year:

2010

Language:

english

File:

PDF, 924 KB

english, 2010

10

SPIE Proceedings [SPIE Advanced Lithography - San Jose, CA (Sunday 25 February 2007)] Advances in Resist Materials and Processing Technology XXIV - Building an immersion topcoat from the ground up: materials perspective

Khojasteh, Mahmoud, Lin, Qinghuang, Popova, Irene, Varanasi, P. Rao, Sundberg, Linda, Robinson, C., Corliss, D., Lawson, Margaret, Dabbagh, G., Slezak, M., Colburn, Matthew, Petrillo, K.

Year:

2007

Language:

english

File:

PDF, 626 KB

english, 2007

11

A New Breed of Wet-Developable BARC Materials

Vyklicky, Libor, Huang, Wu-Song, Popova, Irene, Varanasi, Pushkara Rao, Cameron, James, Amara, Johan, Sung, Jin Wuk, Valeri, David, Prokopowicz, Greg, Ware, Adam, O'Connell, Kathleen, Desisto, Jason,

Journal:

Journal of Photopolymer Science and Technology

Year:

2009

File:

PDF, 3.71 MB

2009

12

Design and Development of Developable BARCs (DBARCs) for Advanced Lithographic Applications

Cameron, James, Amara, John, Sung, Jin Wuk, Valeri, David, Ware, Adam, O'Shea, Kevin, Yamamoto, Yoshihiro, Kitaguchi, Hiroaki, Vyklicky, Libor, Popova, Irene, Varanashi, Pushkara Rao

Journal:

Journal of Photopolymer Science and Technology

Year:

2010

Language:

english

File:

PDF, 605 KB

english, 2010

13

Psychological Differences in Stayers and Leavers: Emigration Desires in Central and Eastern European University Students

Frieze, Irene H., Boneva, Bonka S., Šarlija, Nataša, Horvat, Jasna, Ferligoj, Anušska, Kogovšek, Tina, Miluska, Jolanta, Popova, Ludmila, Korobanova, Janna, Sukhareva, Nadejda, Erokhina, Ludmila, Jaro

Journal:

European Psychologist

Year:

2004

Language:

english

File:

PDF, 110 KB

english, 2004

14

Genomic Sequence of the Strain Enterococcus faecium ICIS 18

Sycheva, M. V., Popova, L. P., Pashkova, T. M., Khlopko, Y. A., Kartashova, O. L., Andreeva, A. V., Poshvina, D. V., Newton, Irene L. G.

Journal:

Microbiology Resource Announcements

Year:

2020

File:

PDF, 112 KB

2020